JDS-1立式接觸式干涉儀 本儀器是一種采用量塊或標(biāo)準(zhǔn)零件借以高精度的比較方式的立式精密長(zhǎng)度計(jì)量?jī)x器。主要用于150mm以下塊規(guī),亦可用作高精密度的長(zhǎng)度和外徑的精密測(cè)量,是各級(jí)計(jì)量室的基本長(zhǎng)度計(jì)量?jī)x器之一。 JDS-1 Interferometer is applicable for measurement of 3-4 grade gauge blocks or precision sizes up to 150 mm by high-precision comparison with a higher grade of gauge block or a standard reference component. It is one of the basic length-metrological instruments. and cylinders. JDS-1立式接觸式干涉儀技術(shù)參數(shù):
被測(cè)件最大長(zhǎng)度 Max. measured length
150 mm
工作臺(tái)行程 Lifting range of worktable
5 mm
測(cè)桿移動(dòng)范圍
0.5mm
分劃板刻度范圍
±50格
直接測(cè)量范圍 Measuring range
5-20μm
分度值調(diào)整范圍 Adjusting range of grad
0.05-0.2 μm
推薦使用分度值Recommended grad
0.1 μm
測(cè)量壓力 Measuring force
(1.5±0.1) N
儀器示值穩(wěn)定性 Indication reliability
0.02 μm
儀器誤差 Indication error
數(shù)字顯示 Digital display
最大測(cè)量誤差 Max.measurement error
n 是格數(shù), i是格值,λ是濾光片中心波長(zhǎng),△λ是濾光片波長(zhǎng)誤差 n is number of divisions, i is division value △λ is error of wavelength